The possible investments are part of a wider, long-term strategy to reduce exposure to China, two people familiar with the plan told Reuters.
ASML's lithography systems can cost up to 160 million euros ($170 million) each and are used to create the circuitry of computer chips.
The Dutch government on Wednesday announced new restrictionson exports impacting ASML's second-best range of chip-printing tools, which could lead to Chinese retaliation.
Among the companies on the mission is Neways, which helps ASML develop electrical control units, power controls and wiring systems for lithography systems, according to the company's website.
ASML supplier NTS Group, which is a provider of precision mechanics tools, is another company that will join the business trip, Brainport said.