An ASML spokesperson said the company will have a customer support team for Rapidus, but could not immediately confirm staff numbers.
Nikkei, which first reported the news, said that 50 ASML engineers will install an ASML "EUV" machine on a prototype line in Chitose City, Hokkaido.
"We always have engineers that support our systems in our customers' fabs," the ASML spokesperson said, referring to customers' factories.
TSMC, Samsung, Intel and memory chip specialists SK Hynix and Micron currently manufacture using ASML's EUV tools.
The Nikkei report said ASML is also expanding its existing support base for TSMC, which is building a major plant in Kumamoto in Japan.
Persons:
Dado Ruvic, ASML, Rocky Swift, Toby Sterling, Louise Heavens, Jane Merriman
Organizations:
REUTERS, Rights, Rapidus, Nikkei, Samsung, Intel, SK Hynix, Micron, Thomson
Locations:
Hokkaido, Chitose City, Kumamoto, Japan