Taiwan Economy Minister Wang Mei-hua said the ministry would be looking into whether the firms' activities in China "matched up" with their initial investment approval from the island's government.
A Bloomberg news report this week said the firms had been working with Huawei-connected firms to build infrastructure for chip plants.
The companies - Topco Scientific (5434.TW), L&K Engineering (6139.TW), United Integrated Services (2404.TW) and Cica-Huntek Chemical Technology Taiwan (6725.TWO) - have all denied any wrongdoing.
Wang also said Taiwan's government will soon unveil tighter rules on "key technologies", taking into account international practice, she added, without giving details.
China claims Taiwan as its own territory and has in recent years increased its military activities around the island.
Persons:
Peter Nicholls, Wang Mei, Wang, chipmaker TSMC, Ben Blanchard, Edwina Gibbs
Organizations:
Huawei, REUTERS, Rights, Bloomberg, K Engineering, United Integrated Services, Chemical Technology, Thomson
Locations:
London, Britain, Rights TAIPEI, China, Taiwan, Chemical Technology Taiwan, U.S